Service & Repair
Semiconductor Equipment
Refurbishment, Tool relocation , Retrofit, Preventive Maintenance, Trouble-shooting ,Consumable parts & Non-consumable parts supply, Warranty contracts and Used tools.. for all Aspen II system.
RF Matching
Trazar RF Match Products Repair for Mattson ICP and Novellus C1&C2, LAM RF Match Repair for 9400/9600.
OEM Parts
We offer many kinds of spare parts to the front-end semiconductor equipments, including Quartzware, Sapphire parts, O-ring and so on. Please feel free to contact with our sales for further detail information.
Subassembly Refurbishment
Include : Robot Assy, Shuttle Assy, Robot Arm Assy., Slit Door Assy, Lift Pin Assy, Heater Block, Motor Control PCB, LED Panel and so on.
Consumable Parts
Consumable Parts
HEATER,TBLR,750W,W.328DIA,120V,CAP,50 PF
Non-Consumable Parts
SENSOR, OPTO, SLOT