服務與維修
RF Matching
| Type of components | Equipment company | Manufacturing | Model |
|---|---|---|---|
| Terminal | CANNON | DEC | VS284-F |
| RF Matching network | MATTSON | Trazar | AMU10D-1 |
| AMU10D-2 | |||
| RF Services. | RFS1000 (Triode) | ||
| RFS1000 (Diode) | |||
| NOVELLUS Concept 1 & 2 | Trazar | AMU10D-1 | |
| AMU10D-2 | |||
| AMU10E-1 | |||
| AMU10E-2 | |||
| CONTEC | AMU2-1 | ||
| Applied Materials 5000 Series(Etch， PVD， MXP， MXP+) | AE | AZX-90 | |
| AMAT | 0010-09416 | ||
| 0010-09417 | |||
| 0010-09750/09750W | |||
| 0010-20442 | |||
| 0010-30686 HE | |||
| 0010-04137 MCVD | |||
| 0010-20524 PVD | |||
| 0010-20525 PVD | |||
| 0010-36162 | |||
| 0010-36408 DP | |||
| 0010-04138 MCVD | |||
| 0010-13627 HE BIAS | |||
| 0010-22161 HE BIAS | |||
| 0010-18129 | |||
| 0010-18130 | |||
| LAM | LAM 9400/9600 | 853-032294-001 | |
| 853-032294-002 | |||
| 853-032294-003 | |||
| 853-032294-004 | |||
| 853-032294-603 | |||
| Mini Match |
Trazar RF Match Products Repair for Mattson ICP and Novellus C1&C2
LAM RF Match Repair for 9400/9600
AMAT RF Match Repair for all kinds of Applied RF Match
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