Service & Repair
Semiconductor Equipment
| Name | Service content | |
|---|---|---|
| Aspen II | Refurbishment, Tool relocation , Retrofit, Preventive Maintenance, Trouble-shooting ,Consumable parts & Non-consumable parts supply, Warranty contracts and Used tools.. for all Aspen II system. | |
| Aspen III | Consumable parts & Non-consumable parts supply, for all Aspen III system. | |
| RTP 3000 Pre-Aligner | Refurbishment Service | |
| Rorze Robot | Refurbishment Service | |
| 9400/9600 Top Match | Refurbishment Service | |
| Bottom Match | Refurbishment Service | |
|
||
| Name | Service content | |
|---|---|---|
| PVD、CVD、Etcher、CMP | Computer interface card | |
| Circuit board、RF Match | Refurbishment Service | |
| O-ring、Sapphire | Alternate Consumable Parts | |
|
||
| AMAT P/N | Description | Description | Return |
|---|---|---|---|
| 0100-00003 | STEPPER Ⅰ | 29 | 0 |
| 0100-00063 | STEPPER Ⅱ | 7 | 0 |
| 0100-11002 | DI/DO | 33 | 0 |
| 0100-11001 | ANALOG OUTPUT | 19 | 0 |
| 0100-09054 | ANALOG INPUT | 38 | 0 |
| 0100-00782 | ANALOG INPUT | 5 | 0 |
| 0100-76124 | DI/DO | 46 | 0 |
| 0100-20003 | DI/DO | 75 | 1 |
| 0100-20067 | STEPPER | 3 | 0 |
| 0100-20173 | STEPPER | 9 | 0 |
| 0100-20001 | SEI | 43 | 1 |
| 0100-20100 | AI/O | 43 | 1 |
| 0100-20100 | AI/O | 265 | 1 |
| 0100-14007 | AUTO LOADER INTERFACE PCB ASSY | 4 | 0 |
Refurbishment service for Concept I & II PECVD RF Match box, such as Trazar AMU RF match. And spare parts supply such as Quartz window, O-rings and Sapphire parts.
If you have any technical questions above, please contact weike technical support window!!